마그네트론 스퍼터링에서의 타겟 식각 및 박막 증착에 관한 연구Study on the target erosion and film deposition in magnetron sputtering system
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이원종 | - |
| dc.contributor.advisor | Lee, Won-Jong | - |
| dc.contributor.author | 최선희 | - |
| dc.contributor.author | Choi, Sun-Hee | - |
| dc.date.accessioned | 2011-12-15T01:35:16Z | - |
| dc.date.available | 2011-12-15T01:35:16Z | - |
| dc.date.issued | 2003 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=180282&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50918 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 2003.2, [ viii, 82 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 스퍼터링 | - |
| dc.subject | Sputtering | - |
| dc.title | 마그네트론 스퍼터링에서의 타겟 식각 및 박막 증착에 관한 연구 | - |
| dc.title.alternative | Study on the target erosion and film deposition in magnetron sputtering system | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 180282/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 020013606 | - |
| dc.contributor.localauthor | 이원종 | - |
| dc.contributor.localauthor | Lee, Won-Jong | - |
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