마그네트론 스퍼터링에서의 타겟 식각 및 박막 증착에 관한 연구 = Study on the target erosion and film deposition in magnetron sputtering system

Advisors
이원종researcherLee, Won-Jongresearcher
Publisher
한국과학기술원
Issue Date
2003
Identifier
180282/325007 / 020013606
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 재료공학과, 2003.2, [ viii, 82 p. ]

Keywords

스퍼터링; Sputtering

URI
http://hdl.handle.net/10203/50918
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=180282&flag=t
Appears in Collection
MS-Theses_Master(석사논문)
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