Polyimide 위에 스퍼터 증착한 Cu 및 Cr 박막의 잔류응력에 관한 연구A study on the residual stress of sputter-deposited Cu and Cr thin films on polyimide
- Advisors
- 유진researcher; Yu, Jinresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 2001
- Identifier
- 165448/325007 / 000993521
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 재료공학과, 2001.2, [ vi, 41 p. ]
- Keywords
폴리이미드; 잔류응력; 곡률; curvature; polyimide; residual stress
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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