$O_2/Cl_2$ ECR 플라즈마를 이용한 $RuO_2$ 박막의 건식 식각특성에 관한 연구Dry etching chacrateristics of $RuO_2$ thin film in $O_2/Cl_2$ electron cycl0tron resonance plasma
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이원종 | - |
| dc.contributor.advisor | Lee, Won-Jong | - |
| dc.contributor.author | 김종삼 | - |
| dc.contributor.author | Kim, Jong-Sam | - |
| dc.date.accessioned | 2011-12-15T01:30:17Z | - |
| dc.date.available | 2011-12-15T01:30:17Z | - |
| dc.date.issued | 1997 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=113132&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50618 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1997.2, [ [ii], 79 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 플라즈마식각 | - |
| dc.subject | 염소플라즈마 | - |
| dc.subject | ECR | - |
| dc.subject | Plasma etching | - |
| dc.title | $O_2/Cl_2$ ECR 플라즈마를 이용한 $RuO_2$ 박막의 건식 식각특성에 관한 연구 | - |
| dc.title.alternative | Dry etching chacrateristics of $RuO_2$ thin film in $O_2/Cl_2$ electron cycl0tron resonance plasma | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 113132/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000953113 | - |
| dc.contributor.localauthor | 이원종 | - |
| dc.contributor.localauthor | Lee, Won-Jong | - |
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