Ni/α-Si 계면에서 Ni 실리사이드 형성에 관한 연구A study of Ni silicide formation in Ni/α-Si system
- Advisors
- 이재영; Lee, Jai-Young
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1996
- Identifier
- 106164/325007 / 000943159
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 재료공학과, 1996.2, [ [iii], 54 p. ]
- Keywords
성장기구; 실리사이드; 활성화 에너지; Silicide; Activation Energy; Growth Kinetics Mechanism
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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