플라즈마 화학증착법에 의하여 증착된 Aluminum oxide 박막의 에칭 특성에 관한 연구 = A study on etching properties of aluminum oxide films deposited by plasma enhanced chemical vapor deposition

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Advisors
천성순researcherChun, Soung-Soonresearcher
Description
한국과학기술원 : 재료공학과,
Publisher
한국과학기술원
Issue Date
1991
Identifier
68061/325007 / 000891464
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 재료공학과, 1991.2, [ [iv], 85 p. ]

URI
http://hdl.handle.net/10203/50485
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=68061&flag=dissertation
Appears in Collection
MS-Theses_Master(석사논문)
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