유도결합 플라즈마를 이용한 PZT 박막의 건식에칭 특성에 관한 연구 = A study on the etching characteristics of PZT films using Inductively coupled Plasma

Advisors
이원종researcherLee, Won-Jongresearcher
Publisher
한국과학기술원
Issue Date
2001
Identifier
165735/325007 / 000965828
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 재료공학과, 2001.2, [ vi, 91 p. ]

Keywords

Cl2; PZT; 건식식각; 유도결합 플라즈마; CF4; CF4; Cl2; PZT; dry etching; inductively coupled plasma

URI
http://hdl.handle.net/10203/50409
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=165735&flag=t
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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