학위논문(박사) - 한국과학기술원 : 재료공학과, 1999.8, [ xii, [114] p. ]
Thin film; Sputtering; Crystallographic orientation; Residual stress; Strain energy; 변형에너지; 박막; 스퍼터링; 결정방향성; 잔류응력
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