기상합성 다이아몬드의 핵생성 및 성장에 미치는 바이어스 인가 효과 = Effects of electrical bias on nucleation and growth of CVD diamond

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Advisors
윤덕용researcherYoon, Duk-Yongresearcher
Description
한국과학기술원 : 재료공학과,
Publisher
한국과학기술원
Issue Date
1999
Identifier
155989/325007 / 000955190
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 재료공학과, 1999.2, [ vi, 150 p. ]

Keywords

직류 방전; 네거티브 글로우; 바이어스; CVD 다이아몬드; 식각; Etching; DC discharge; Negative glow; Bias; CVD diamond

URI
http://hdl.handle.net/10203/50362
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=155989&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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