ECR-PEMOCVD법을 이용한 $SrTiO_3$박막과 $(BaSr)TiO_3$ 박막의 제조 및 특성분석Fabrication and characterization of $SrTiO_3$ and $BaSrTiO_3$ thin films using ECR-PEMOCVD

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Advisors
노광수researcherNo, Kwang-Sooresearcher
Description
한국과학기술원 : 재료공학과,
Publisher
한국과학기술원
Issue Date
1998
Identifier
143462/325007 / 000945333
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 재료공학과, 1998.2, [ x, 150 p. ]

Keywords

암모니아 운반기체; ECR플라즈마를 이용한 화학기상증착법; 바륨스트론튬타이타네이트; 스트론튬타이타네이트; 화학결합상태; Chemical bonding state; NH3 carrier gas; ECR-PEMOCVD; BST; SrTiO3

URI
http://hdl.handle.net/10203/50345
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=143462&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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