학위논문(박사) - 한국과학기술원 : 재료공학과, 2002.2, [ ii, 113 p. ]
유도결합플라즈마; 확산방지막; TaSiN; TaN; 금속유기물화학증착법; MOCVD; transformer coupled plasma; diffusion barrier; TaSiN; TaN
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