MEMS 소자의 응용을 위한 실리콘 기판 위에 형성된 PZT 후막의 제조 및 평가Fabrication and characterization of the PZT thick film on Silicon substrate for MEMS applications
- Advisors
- 노광수researcher; No, Kwang-Sooresearcher
- Description
- 한국과학기술원: 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 2001
- Identifier
- 165773/325007 / 000975342
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원: 재료공학과, 2001.2, [ ix, 148 p. ]
- Keywords
확산방지막; 스크린 프린팅; 후막; 압전체; 초소형정밀기계; MEMS; diffusion barrier; screen printing; PZT thick film; piezoelectric
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.