화학증착법으로 제조한 다이아몬드막에서의 잔류응력에 관한 연구 = A study of residual stresses on CVD diamond films

Advisors
유진researcherYu, Jinresearcher
Publisher
한국과학기술원
Issue Date
1998
Identifier
143448/325007 / 000939001
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 재료공학과, 1998.8, [ viii, 106 p. ]

Keywords

수소농도; 잔류응력; 다이아몬드; 화학증착법; 라만분석; Raman spectroscopy; Hydrogen concentration; Residual stress; Diamond; CVD

URI
http://hdl.handle.net/10203/50210
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=143448&flag=t
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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