DMEAA source를 이용한 Al-MOCVD mechanism 및 특성에 관한 연구A study on the Al-MOCVD mechanism and characteristics using DMEAA source
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 안병태 | - |
| dc.contributor.advisor | Ahn, Byung-Tae | - |
| dc.contributor.author | 장태웅 | - |
| dc.contributor.author | Jang, Tae-Woong | - |
| dc.date.accessioned | 2011-12-15T01:03:27Z | - |
| dc.date.available | 2011-12-15T01:03:27Z | - |
| dc.date.issued | 1998 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=143447&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50209 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 재료공학과, 1998.8, [ vi, 155 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 선택적 증착 | - |
| dc.subject | 수소 플라즈마 | - |
| dc.subject | 금속유기물 기상화학증착 | - |
| dc.subject | 알루미늄 박막 | - |
| dc.subject | 전압 인가 | - |
| dc.subject | Bias | - |
| dc.subject | Selective deposition | - |
| dc.subject | Hydrogen plasma | - |
| dc.subject | Aluminum MOCVD | - |
| dc.subject | DMEAA | - |
| dc.title | DMEAA source를 이용한 Al-MOCVD mechanism 및 특성에 관한 연구 | - |
| dc.title.alternative | A study on the Al-MOCVD mechanism and characteristics using DMEAA source | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 143447/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000935314 | - |
| dc.contributor.localauthor | 장태웅 | - |
| dc.contributor.localauthor | Jang, Tae-Woong | - |
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