DMEAA source를 이용한 Al-MOCVD mechanism 및 특성에 관한 연구A study on the Al-MOCVD mechanism and characteristics using DMEAA source
- Advisors
- 안병태researcher; Ahn, Byung-Taeresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1998
- Identifier
- 143447/325007 / 000935314
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 재료공학과, 1998.8, [ vi, 155 p. ]
- Keywords
선택적 증착; 수소 플라즈마; 금속유기물 기상화학증착; 알루미늄 박막; 전압 인가; Bias; Selective deposition; Hydrogen plasma; Aluminum MOCVD; DMEAA
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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