DMEAA source를 이용한 Al-MOCVD mechanism 및 특성에 관한 연구 = A study on the Al-MOCVD mechanism and characteristics using DMEAA source

Advisors
안병태researcherAhn, Byung-Taeresearcher
Publisher
한국과학기술원
Issue Date
1998
Identifier
143447/325007 / 000935314
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 재료공학과, 1998.8, [ vi, 155 p. ]

Keywords

선택적 증착; 수소 플라즈마; 금속유기물 기상화학증착; 알루미늄 박막; 전압 인가; Bias; Selective deposition; Hydrogen plasma; Aluminum MOCVD; DMEAA

URI
http://hdl.handle.net/10203/50209
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=143447&flag=t
Appears in Collection
MS-Theses_Ph.D.(박사논문)
Files in This Item
There are no files associated with this item.
  • Hit : 78
  • Download : 0
  • Cited 0 times in thomson ci

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0