타이타늄실리사이드 박막의 응집현상과 응력의 영향에 관한 연구 = Study on the agglomeration of TiSi2 thin film and stress effect

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Advisors
박중근researcherPark, Joong-Keunresearcher
Description
한국과학기술원 : 재료공학과,
Publisher
한국과학기술원
Issue Date
1997
Identifier
112988/325007 / 000865121
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 재료공학과, 1997.2, [ v, 135 p. ]

Keywords

타이타늄실리사이드; Stress; Grain; Agglomeration; Thin film; TiSi2; 응력; 박막; 응집; 결정립

URI
http://hdl.handle.net/10203/50160
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=112988&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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