DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 천성순 | - |
dc.contributor.advisor | Chun, Soung-Soon | - |
dc.contributor.author | 윤수식 | - |
dc.contributor.author | Yoon, Soo-Sik | - |
dc.date.accessioned | 2011-12-15T01:02:22Z | - |
dc.date.available | 2011-12-15T01:02:22Z | - |
dc.date.issued | 1996 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=106199&flag=dissertation | - |
dc.identifier.uri | http://hdl.handle.net/10203/50144 | - |
dc.description | 학위논문(박사) - 한국과학기술원 : 재료공학과, 1996.2, [ v, 89 p. ] | - |
dc.language | kor | - |
dc.publisher | 한국과학기술원 | - |
dc.subject | 유기 금속 화학 증착법 | - |
dc.subject | 구리박막 | - |
dc.subject | Copper thin film | - |
dc.subject | MOCVD | - |
dc.title | 금속 유기 화학 증착법에 의해 증착된 구리 박막의 증착 및 물성에 관한 연구 | - |
dc.title.alternative | A study on the deposition and the film characteristics of MOCVD copper thin films | - |
dc.type | Thesis(Ph.D) | - |
dc.identifier.CNRN | 106199/325007 | - |
dc.description.department | 한국과학기술원 : 재료공학과, | - |
dc.identifier.uid | 000925231 | - |
dc.contributor.localauthor | 윤수식 | - |
dc.contributor.localauthor | Yoon, Soo-Sik | - |
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