화학증착법에 의해 제조된 Blanket 및 selective 텅스텐박막의 물성에 관한 연구The study on the properties of blanket and selective tungsten prepered by CVD
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 천성순 | - |
| dc.contributor.advisor | Chun, Soung-Soon | - |
| dc.contributor.author | 박영욱 | - |
| dc.contributor.author | Park, Young-Wook | - |
| dc.date.accessioned | 2011-12-15T01:01:02Z | - |
| dc.date.available | 2011-12-15T01:01:02Z | - |
| dc.date.issued | 1991 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=61779&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50061 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 재료공학과, 1991.2, [ v, 106 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | Chemical vapor deposition | - |
| dc.title | 화학증착법에 의해 제조된 Blanket 및 selective 텅스텐박막의 물성에 관한 연구 | - |
| dc.title.alternative | The study on the properties of blanket and selective tungsten prepered by CVD | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 61779/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000865154 | - |
| dc.contributor.localauthor | 박영욱 | - |
| dc.contributor.localauthor | Park, Young-Wook | - |
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- MS-Theses_Ph.D.(박사논문)
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