화학증착법에 의해 제조된 Blanket 및 selective 텅스텐박막의 물성에 관한 연구 = The study on the properties of blanket and selective tungsten prepered by CVD

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Advisors
천성순researcherChun, Soung-Soonresearcher
Description
한국과학기술원 : 재료공학과,
Publisher
한국과학기술원
Issue Date
1991
Identifier
61779/325007 / 000865154
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 재료공학과, 1991.2, [ v, 106 p. ]

Keywords

Chemical vapor deposition

URI
http://hdl.handle.net/10203/50061
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=61779&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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