나노 임프린트 공정용 광경화성 플르오르화 하이브리머의 제조 및 특성 = Synthesis and characterization of UV curable fluorinated hybrimers for nano imprints

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Advisors
배병수researcherBae, Byeong-Sooresearcher
Description
한국과학기술원 : 신소재공학과,
Publisher
한국과학기술원
Issue Date
2006
Identifier
258124/325007  / 020035813
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 신소재공학과, 2006.8, [ ix, 149 p. ]

Keywords

나노임프린트; 소프트 리소그래피; 하이브리머; 솔-젤; 표면 장력; surface tension; nano-imprint; soft-lithography; hybrimer; Sol-gel

URI
http://hdl.handle.net/10203/49685
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=258124&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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