RF-diode sputtering법에 의한 Y-Ba-Cu-O 초전도체의 박막공정 연구Fabrication of superconducting Y-Ba-Cu-O thin films by RF-diode sputtering method
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 박신종 | - |
| dc.contributor.advisor | 이주천 | - |
| dc.contributor.advisor | Park, Sin-Chong | - |
| dc.contributor.advisor | Lee, Choo-Chon | - |
| dc.contributor.author | 유형준 | - |
| dc.contributor.author | Yoo, Hyung-Joun | - |
| dc.date.accessioned | 2011-12-14T07:51:02Z | - |
| dc.date.available | 2011-12-14T07:51:02Z | - |
| dc.date.issued | 1990 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=67151&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/48234 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 물리학과, 1990.2, [ [iii], 67 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | RF-diode sputtering법에 의한 Y-Ba-Cu-O 초전도체의 박막공정 연구 | - |
| dc.title.alternative | Fabrication of superconducting Y-Ba-Cu-O thin films by RF-diode sputtering method | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 67151/325007 | - |
| dc.description.department | 한국과학기술원 : 물리학과, | - |
| dc.identifier.uid | 000861721 | - |
| dc.contributor.localauthor | 유형준 | - |
| dc.contributor.localauthor | Yoo, Hyung-Joun | - |
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- PH-Theses_Master(석사논문)
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