Continuum model of RF glow discharge = RF 글로우 방전의 연속체 모델

By a macroscopic fluid description the numerical model of RF glow discharge is constructed. The model is based on a self-consistent solution of the continuity equations for electron, positive ion and negative on coupled with Poisson``s equation. With the model the physical properties of the discharge is described and discussed. And the effects of the negative ion formation is analyzed using two different gases. The influence of some discharge parameter is also presented.
Advisors
Choi, Duk-Inresearcher최덕인researcher
Publisher
한국과학기술원
Issue Date
1989
Identifier
66636/325007 / 000871433
Language
eng
Description

학위논문(석사) - 한국과학기술원 : 물리학과, 1989.2, [ ii, 38 p. ]

URI
http://hdl.handle.net/10203/48217
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=66636&flag=t
Appears in Collection
PH-Theses_Master(석사논문)
Files in This Item
There are no files associated with this item.
  • Hit : 75
  • Download : 0
  • Cited 0 times in thomson ci

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0