전자 현미경 관찰에 의한 3층 레지스트 리소그라피 연구Electron microscopic investigation on trilayer resist processing for fine line optical lithography
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 박신종 | - |
| dc.contributor.advisor | 이상수 | - |
| dc.contributor.advisor | Park, Sin-Chong | - |
| dc.contributor.advisor | Lee, Sang-Soo | - |
| dc.contributor.author | 남기수 | - |
| dc.contributor.author | Nam, Kee-Soo | - |
| dc.date.accessioned | 2011-12-14T07:49:25Z | - |
| dc.date.available | 2011-12-14T07:49:25Z | - |
| dc.date.issued | 1986 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=65015&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/48130 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 물리학과, 1986.2, [ iv, 71 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | 전자 현미경 관찰에 의한 3층 레지스트 리소그라피 연구 | - |
| dc.title.alternative | Electron microscopic investigation on trilayer resist processing for fine line optical lithography | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 65015/325007 | - |
| dc.description.department | 한국과학기술원 : 물리학과, | - |
| dc.identifier.uid | 000821913 | - |
| dc.contributor.localauthor | 남기수 | - |
| dc.contributor.localauthor | Nam, Kee-Soo | - |
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- PH-Theses_Master(석사논문)
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