(The) generation of periodic ripples on silicon by pulsed ruby laser = 펄스 루비 레이저에 의한 실리콘 표면에서의 주기적 파상의 생성

The periodic ripple structures were produced on single (100) crystal of silicon by mode-locked or conventional mode pulses from ruby laser. In mode-locked operation of laser, the spatial periods of ripples were $0.7\mu m,\; 1.4 \mu m,\; 0.9 \mu m$ at incident angle $0\,^\circ,\; 30\,^\circ,\; 45\,^\circ$, respectively. These values were in good agreement with the usual surface scattered wave model. In conventional mode operation, linear and circular ripples with spatial periods $4.5 \mu m$ and $6 \mu m$ at near normal incidence were produced and the results are consistent with the laser-acoustic mode coupling model.
Kim, Jae-Kwanresearcher김재관researcher
Publisher
한국과학기술원
Issue Date
1985
Identifier
64467/325007 / 000831321
Language
eng
Description

학위논문(석사) - 한국과학기술원 : 물리학과, 1985.2, [ ii, 35 p. ]

URI
http://hdl.handle.net/10203/48107
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=64467&flag=t
Appears in Collection
PH-Theses_Master(석사논문)
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