ECR (electron cyclotron resonance) -PECVD 방법으로 증착한 미세결정 규소박막의 특성에 관한 연구 = Characteristics of microcrystalline silicon prepared by ECR-PECVD

Advisors
이주천researcherLee, Choo-Chonresearcher
Publisher
한국과학기술원
Issue Date
1992
Identifier
59973/325007 / 000901135
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 물리학과, 1992.2, [ [ii], 43 p. ]

URI
http://hdl.handle.net/10203/47861
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=59973&flag=t
Appears in Collection
PH-Theses_Master(석사논문)
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