UV submicron lithography 를 위한 4반사광학계의 설계 및 수차해석 = Design and analysis of the four mirror optical system for UV submicron lithography

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Advisors
이상수Lee, Sang-Soo
Description
한국과학기술원 : 물리학과,
Publisher
한국과학기술원
Issue Date
1991
Identifier
61842/325007 / 000865147
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 물리학과, 1991.2, [ iii, 86 p. ]

URI
http://hdl.handle.net/10203/47829
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=61842&flag=dissertation
Appears in Collection
PH-Theses_Ph.D.(박사논문)
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