헬리콘파 플라즈마 발생 및 특성 연구 = Study of helicon wave plasma production and its characteristics

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Advisors
장홍영researcherChang, Hong-Youngresearcher
Description
한국과학기술원 : 물리학과,
Publisher
한국과학기술원
Issue Date
1996
Identifier
108886/325007 / 000925078
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 물리학과, 1996.8, [ ix, 117 p. ]

Keywords

High density plasmas; SiOF film; Helicon waves; SiOF 박막; 헬리콘파; 고밀도 플라즈마

URI
http://hdl.handle.net/10203/47542
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=108886&flag=dissertation
Appears in Collection
PH-Theses_Ph.D.(박사논문)
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