플라즈마 화학 증착법으로 제작한 미세 결정 규소 박막의 특성에 관한 연구Charaterization of microcrystalline silicon films drepared by plasma enhanced chemical vapor deposition
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 신성철 | - |
| dc.contributor.advisor | 이주천 | - |
| dc.contributor.advisor | Shin, Sung-Chul | - |
| dc.contributor.advisor | Lee, Choo-Chon | - |
| dc.contributor.author | 최광열 | - |
| dc.contributor.author | Choi, Kwang-Yeol | - |
| dc.date.accessioned | 2011-12-14T07:26:45Z | - |
| dc.date.available | 2011-12-14T07:26:45Z | - |
| dc.date.issued | 1996 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=105327&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/47525 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 물리학과, 1996.2, [ xi, 103 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | TEM | - |
| dc.subject | PECVD | - |
| dc.subject | XRD | - |
| dc.subject | silicon tetrafluoride | - |
| dc.subject | microcrystalline silicon | - |
| dc.subject | 플라즈마 화학증착법 | - |
| dc.subject | 미세결정 규소 | - |
| dc.title | 플라즈마 화학 증착법으로 제작한 미세 결정 규소 박막의 특성에 관한 연구 | - |
| dc.title.alternative | Charaterization of microcrystalline silicon films drepared by plasma enhanced chemical vapor deposition | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 105327/325007 | - |
| dc.description.department | 한국과학기술원 : 물리학과, | - |
| dc.identifier.uid | 000895497 | - |
| dc.contributor.localauthor | 최광열 | - |
| dc.contributor.localauthor | Choi, Kwang-Yeol | - |
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