전자 싸이클로트론 공명 플라즈마 식각장치내에서 $SF_6$ 방전시 생성된 F 활성원자의 분포특성 연구 = Study on the characteristics of F radical atoms created from the $SF_6$ discharge in ECR plasma etcher

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Advisors
장충석researcherChang, Choong-Seockresearcher
Description
한국과학기술원 : 물리학과,
Publisher
한국과학기술원
Issue Date
1995
Identifier
101835/325007 / 000925070
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 물리학과, 1995.8, [ ix, 80 p. ]

Keywords

플라즈마 변수 평준화; 광분석; 활성원자; 전자싸이클로트론 공명 플라즈마; ECR; actinometry; Optical emission spectroscopy; Plasma parameter normalization; Radical species

URI
http://hdl.handle.net/10203/47519
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=101835&flag=dissertation
Appears in Collection
PH-Theses_Ph.D.(박사논문)
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