DSpace at KOASAS: 전자 싸이클로트론 공명 플라즈마 식각장치내에서 $SF_6$ 방전시 생성된 F 활성원자의 분포특성 연구

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College of Natural Sciences(자연과학대학)Dept. of Physics(물리학과)PH-Theses_Ph.D.(박사논문)

전자 싸이클로트론 공명 플라즈마 식각장치내에서 $SF_6$ 방전시 생성된 F 활성원자의 분포특성 연구Study on the characteristics of F radical atoms created from the $SF_6$ discharge in ECR plasma etcher

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김용진 / Kim, Yong-Jin

Advisors: 장충석 researcher; Chang, Choong-Seock researcher

Description: 한국과학기술원 : 물리학과,

Publisher: 한국과학기술원

Issue Date: 1995

Identifier: 101835/325007 / 000925070

Language: kor

Description: 학위논문(박사) - 한국과학기술원 : 물리학과, 1995.8, [ ix, 80 p. ]

Keywords: 플라즈마 변수 평준화; 광분석; 활성원자; 전자싸이클로트론 공명 플라즈마; ECR; actinometry; Optical emission spectroscopy; Plasma parameter normalization; Radical species

URI: http://hdl.handle.net/10203/47519

Link: http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=101835&flag=dissertation

Appears in Collection: PH-Theses_Ph.D.(박사논문)

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전자 싸이클로트론 공명 플라즈마 식각장치내에서 $SF_6$ 방전시 생성된 F 활성원자의 분포특성 연구Study on the characteristics of F radical atoms created from the $SF_6$ discharge in ECR plasma etcher

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