보조의 미해상 회절 마스크를 사용하는 투영광학계의 결상 특성Imaging characteristics of the optical projection system with the auxiliary dummy diffraction mask

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dc.contributor.advisor이주천-
dc.contributor.advisor박신종-
dc.contributor.advisorLee, Choo-Chon-
dc.contributor.advisorPark, Sin-Chong-
dc.contributor.author유형준-
dc.contributor.authorYoo, Hyung-Joun-
dc.date.accessioned2011-12-14T07:26:15Z-
dc.date.available2011-12-14T07:26:15Z-
dc.date.issued1994-
dc.identifier.urihttp://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=69815&flag=dissertation-
dc.identifier.urihttp://hdl.handle.net/10203/47493-
dc.description학위논문(박사) - 한국과학기술원 : 물리학과, 1994.8, [ v, 107 p. ]-
dc.languagekor-
dc.publisher한국과학기술원-
dc.title보조의 미해상 회절 마스크를 사용하는 투영광학계의 결상 특성-
dc.title.alternativeImaging characteristics of the optical projection system with the auxiliary dummy diffraction mask-
dc.typeThesis(Ph.D)-
dc.identifier.CNRN69815/325007-
dc.description.department한국과학기술원 : 물리학과, -
dc.identifier.uid000865721-
dc.contributor.localauthor유형준-
dc.contributor.localauthorYoo, Hyung-Joun-
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PH-Theses_Ph.D.(박사논문)
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