DSpace at KOASAS: 모든 3차 수차를 제거하여 회절한계의 성능을 지닌 극자외선 lithography용 4-반사경 광학계(배율

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College of Natural Sciences(자연과학대학)Dept. of Physics(물리학과)PH-Theses_Ph.D.(박사논문)

모든 3차 수차를 제거하여 회절한계의 성능을 지닌 극자외선 lithography용 4-반사경 광학계(배율1)

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조영민 / Cho, Young-Min

Advisors: 공홍진 researcher; 이상수 researcher; Kong, Hong-Jin researcher; Lee, Sang-Soo researcher

Description: 한국과학기술원 : 물리학과,

Publisher: 한국과학기술원

Issue Date: 1994

Identifier: 68909/325007 / 000895477

Language: kor

Description: 학위논문(박사) - 한국과학기술원 : 물리학과, 1994.2, [ iv, 94 p. ]

URI: http://hdl.handle.net/10203/47490

Link: http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=68909&flag=dissertation

Appears in Collection: PH-Theses_Ph.D.(박사논문)

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모든 3차 수차를 제거하여 회절한계의 성능을 지닌 극자외선 lithography용 4-반사경 광학계(배율1)

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