분광타원계측에 의한 나노미터 두께 게이트 산화막의 광특성 측정 연구Measurement of optical properties of nanometer-thick gate oxide films by spectroscopic ellipsometry
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 김병윤 | - |
| dc.contributor.advisor | Kim, Byoung-Yoon | - |
| dc.contributor.author | 조현모 | - |
| dc.contributor.author | Cho, Hyun-Mo | - |
| dc.date.accessioned | 2011-12-14T07:22:51Z | - |
| dc.date.available | 2011-12-14T07:22:51Z | - |
| dc.date.issued | 2001 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=169564&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/47275 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 물리학과, 2001.8, [ ix, 102 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 광학상수 | - |
| dc.subject | 이산화규소 박막 | - |
| dc.subject | 게이트 산화막 | - |
| dc.subject | 타원계측 | - |
| dc.subject | Sellmeier 함수 | - |
| dc.subject | Sellmeier function | - |
| dc.subject | optical constants | - |
| dc.subject | silicon dioxide film | - |
| dc.subject | gate oxide | - |
| dc.subject | ellipsometry | - |
| dc.title | 분광타원계측에 의한 나노미터 두께 게이트 산화막의 광특성 측정 연구 | - |
| dc.title.alternative | Measurement of optical properties of nanometer-thick gate oxide films by spectroscopic ellipsometry | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 169564/325007 | - |
| dc.description.department | 한국과학기술원 : 물리학과, | - |
| dc.identifier.uid | 000925368 | - |
| dc.contributor.localauthor | 조현모 | - |
| dc.contributor.localauthor | Cho, Hyun-Mo | - |
- Appears in Collection
- PH-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.