학위논문(석사) - 한국과학기술원 : 기계공학과, 1997.2, [ viii, 75 p. ]
Electrostatic; Surface-micromachining; Bulk-micromachining; Microaccelerometer; Resonant; Capacitive; 정전용량; 정전기력; 박막미세가공; 기판미세가공; 극소형 가속도계; 공진형
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