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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Theses_Master(석사논문)

실리콘의 이방성 식각 특성을 이용한 정전 구동형 초소형 거울의 개발Development of electrostatically-driven vertical micro mirrors using anisotropic silicon etching

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서경선 / Seo, Kyoung-Sun
Advisors
윤성기researcher; 조영호researcher; Youn, Sung-Kieresearcher; Cho, Young-Horesearcher
Description
한국과학기술원 : 기계공학과,
Publisher
한국과학기술원
Issue Date
1996
Identifier
105433/325007 / 000943259
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 기계공학과, 1996.2, [ v, 56 p. ]

Keywords

수직 거울; 정전구동형 액츄에이터; 기판 가공; MEMS; Micromirror; Vertical mirror; Electrostatic actuator; Bulk etching; 마이크로머신; 초소형 거울

URI
http://hdl.handle.net/10203/46531
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=105433&flag=dissertation
Appears in Collection
ME-Theses_Master(석사논문)
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