초정밀 작업을 위한 6자유도 마이크로 스테이지의 개발 = Development of 6 degrees-of-freedom micro stage for ultraprecision positioning

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Advisors
곽윤근researcherKwak, Yoon-Keunresearcher
Description
한국과학기술원 : 기계공학과,
Publisher
한국과학기술원
Issue Date
1996
Identifier
105404/325007 / 000943041
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 기계공학과, 1996.2, [ iii, 46 p. ]

Keywords

초정밀 운동; 압전소자; 마이크로 스테이지; 6자유도; 병렬 링크 구조; Piezoelectric element; Parallel link mechanism; Micro stage; Micro motion; 6 DOF

URI
http://hdl.handle.net/10203/46506
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=105404&flag=dissertation
Appears in Collection
ME-Theses_Master(석사논문)
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