나노압입과 나노리소그래피의 원자수준 전산모사 = Atomistic simulations of nanoindentation and nanolithography

Advisors
임세영researcherIm, Se-Youngresearcher
Publisher
한국과학기술원
Issue Date
2004
Identifier
237924/325007  / 020023447
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 기계공학전공, 2004.2, [ vii, 103 p. ]

Keywords

전위; 나노리소그래피; 나노압입; 분자동역학; 박막; ultra-thin film; dislocation; Nanolithography; Nanoindentation; Molecular dynamics

URI
http://hdl.handle.net/10203/46015
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=237924&flag=t
Appears in Collection
ME-Theses_Master(석사논문)
Files in This Item
There are no files associated with this item.
  • Hit : 81
  • Download : 0
  • Cited 0 times in thomson ci

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0