나노 압입자를 이용한 박막/모재 구조의 계면파괴인성치 평가 = Evaluation of interfacial toughness of film/substrate by nanoindenter

Advisors
엄윤용researcherEarmme, Youn-Youngresearcher
Publisher
한국과학기술원
Issue Date
2004
Identifier
237911/325007  / 020023283
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 기계공학전공, 2004.2, [ v, 39 p. ]

Keywords

단면압입시험; 나노 압입자; 계면박리; 계면파괴인성치; 박막; thin film; cross-sectional nanoindentation; nanoindenter; interfacial delamination; interfacial toughness

URI
http://hdl.handle.net/10203/46002
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=237911&flag=t
Appears in Collection
ME-Theses_Master(석사논문)
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