미소 기전 시스템용 니켈 박막의 기계적 물성 측정Measurement of mechanical properties of electroplated nickel thin film for MEMS application
- Advisors
- 이순복researcher; Lee, Soon-Bokresearcher
- Description
- 한국과학기술원 : 기계공학전공,
- Publisher
- 한국과학기술원
- Issue Date
- 2003
- Identifier
- 180105/325007 / 020013270
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 기계공학전공, 2003.2, [ vii, 70 p. ]
- Keywords
나노인덴터; 니켈; 전기도금; 기계적 성질; 미소 기전 시스템; MEMS; nano indenter; nickel; electro plated; mechanical properties
- Appears in Collection
- ME-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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