레이저를 이용한 실리콘의 공정 접합 방법Eutectic bonding method of silicon using laser

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Advisors
유중돈researcherYoo, Choong-Donresearcher
Description
한국과학기술원 : 기계공학전공,
Publisher
한국과학기술원
Issue Date
2003
Identifier
180083/325007 / 020013549
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 기계공학전공, 2003.2, [ vi, 56 p. ]

Keywords

공정; 실리콘; 레이저; 접합; 패키징; packaging; eutectic; silicon; laser; bonding

URI
http://hdl.handle.net/10203/45390
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=180083&flag=dissertation
Appears in Collection
ME-Theses_Master(석사논문)
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