질량유량계 센서관의 성능에 영향을 미치는 인자들에 관한 실험적 연구Experimental study on the effecting parameters to the performance of the sensor tube of a mass flow controller
- Advisors
- 김성진researcher; Kim, Sung-Jinresearcher
- Description
- 한국과학기술원 : 기계공학전공,
- Publisher
- 한국과학기술원
- Issue Date
- 2001
- Identifier
- 165388/325007 / 000983837
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 기계공학전공, 2001.2, [ viii, 53 p. ]
- Keywords
질량유량계 센서관 성능; 질량유량계 센서관; 질량유량계; MFC; MFC sensor; mass flow meter; mass flow controller
- Appears in Collection
- ME-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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