반도체 웨이퍼 가공 공정에서 흐름시간의 평균과 표준편차를 제어하기 위한 실시간 스케쥴링 방법A real-time scheduling methodology to control the mean and the standard deviation of the flow time in semiconductor wafer fabrication
- Advisors
- 이두용researcher; Lee, Doo-Yongresearcher
- Description
- 한국과학기술원 : 기계공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1999
- Identifier
- 150434/325007 / 000973453
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 기계공학과, 1999.2, [ ix, 60 p. ]
- Keywords
흐름시간; 웨이퍼 가공; 반도체; 실시간 스케쥴링; Real-time scheduling; Flow time; Wafer fabrication; Semiconductor
- Appears in Collection
- ME-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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