광/엑스선 복합간섭 고분해능 레이저 간섭계의 개발 = A high resolution laser interferometer for combined optical x-ray interferometry

Advisors
김승우researcherKim, Seung-Wooresearcher
Publisher
한국과학기술원
Issue Date
1998
Identifier
133472/325007 / 000963078
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 기계공학과, 1998.2, [ viii, 68 p. ]

Keywords

서브 나노미터의 정확도; 복합 간섭계; 고분해능; 레이저 간섭계; 기준점; Reference points; Subnanometric accuracy; Combined interferometry; High resolution; Laser interferometer

URI
http://hdl.handle.net/10203/45014
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=133472&flag=t
Appears in Collection
ME-Theses_Master(석사논문)
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