광/엑스선 복합간섭 고분해능 레이저 간섭계의 개발A high resolution laser interferometer for combined optical x-ray interferometry
- Advisors
- 김승우researcher; Kim, Seung-Wooresearcher
- Description
- 한국과학기술원 : 기계공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1998
- Identifier
- 133472/325007 / 000963078
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 기계공학과, 1998.2, [ viii, 68 p. ]
- Keywords
서브 나노미터의 정확도; 복합 간섭계; 고분해능; 레이저 간섭계; 기준점; Reference points; Subnanometric accuracy; Combined interferometry; High resolution; Laser interferometer
- Appears in Collection
- ME-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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