Micromechanical characterization and initial deflection minimization for piezoelectric multi-layer cantilever microactuators = 압전구동형 다층박막 외팔보의 미소물성 측정 및 초기변형 최소화에 관한 연구

This thesis investigates a method to minimize the initial deflection of a multi-layer piezoelectric microactuator without loosing its piezoelectric deflection performance required for light modulating micromirror devices. The multi-layer piezoelectric actuator, composed of PZT, silicon nitride and platinum layers, deflects or buckles due to the gradient of residual stress. From a structural analysis, the deflection of the multi-layer microactuator has been found as a function of the residual stress and the rigidity of each film layer. The residual stress and Young``s modulus of each layer are measured from a blister test. Based on the structural analysis and measured mechanical properties, we have modified the residual stress and the thickness of thin film layers to reduce the initial residual stress deflection without decreasing its piezoelectric deflection performance. The modified designs, fabricated by surface-micromachining process, achieved the 77% reduction of the initial deflection compared with that of the conventional designs, while maintaining the equivalent piezoelectric deflection performance. The present method based on the measured micromechanical material properties is applicable to the design and refinement of multi-layer MEMS devices with controlled strength and residual stress.
Advisors
Cho, Young-Horesearcher조영호researcher
Publisher
한국과학기술원
Issue Date
1998
Identifier
133470/325007 / 000963070
Language
eng
Description

학위논문(석사) - 한국과학기술원 : 기계공학과, 1998.2, [ vii, 58 p. ]

Keywords

Microactuator; 압전구동형; 초기변형; 다층박막 외팔보; Initial deflelction; Multi-layer cantilever; 소형 액추에이터; Piezoelectric

URI
http://hdl.handle.net/10203/45012
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=133470&flag=t
Appears in Collection
ME-Theses_Master(석사논문)
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