학위논문(석사) - 한국과학기술원 : 기계공학과, 1998.2, [ vii, 58 p. ]
Microactuator; 압전구동형; 초기변형; 다층박막 외팔보; Initial deflelction; Multi-layer cantilever; 소형 액추에이터; Piezoelectric
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