학위논문(석사) - 한국과학기술원 : 기계공학과, 1998.2, [ xii, 99 p. ]
MEMS devices; Squeezing plate damping titlting plate damping; Micromechnical dynamic structures; Viscous damping; Surface micromaching; 표면미세가공; 미소기전시스템; 경사 감쇠; 압착 감쇠; 미소 동적 구조물; 점성 감쇠
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