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NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
Feasibility study of using thin aluminum nitride film as a buffer layer for dual metal gate process

Park, CS; Cho, Byung Jinresearcher; Balasubramanian, N; Kwong, DL, THIN SOLID FILMS, v.462, pp.15 - 18, 2004-09

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