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Results 1-10 of 13 (Search time: 0.002 seconds).

1

ELIMINATION OF SLIPS ON SILICON-WAFER EDGE IN RAPID THERMAL-PROCESS BY USING A RING OXIDE

Cho, Byung Jinresearcher; Kim, Choong Ki, JOURNAL OF APPLIED PHYSICS, v.67, no.12, pp.7583 - 7586, 1990-06

2

Role of hole fluence in gate oxide breakdown

Li, MF; He, YD; Ma, SG; Cho, Byung Jinresearcher; Lo, KF; Xu, MZ, IEEE ELECTRON DEVICE LETTERS, v.20, no.11, pp.586 - 588, 1999-11

3

Conduction mechanism under quasibreakdown of ultrathin gate oxide

He, YD; Guan, H; Li, MF; Cho, Byung Jinresearcher; Dong, Z, APPLIED PHYSICS LETTERS, v.75, no.16, pp.2432 - 2434, 1999-10

4

Impact of nitrogen implantation into polysilicon followed by drive-in process on gate oxide integrity

Cho, Byung Jinresearcher; Ko, LH; Nga, YA; Chan, LH, JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.146, no.11, pp.4259 - 4262, 1999-11

5

Isolation process induced wafer warpage

Jang, SA; Yeo, IS; Kim, YB; Cho, Byung Jinresearcher; Lee, SK, ELECTROCHEMICAL AND SOLID STATE LETTERS, v.1, no.1, pp.46 - 48, 1998-07

6

DEVELOPMENT OF A HEXAGONAL-SHAPED RAPID THERMAL PROCESSOR USING A VERTICAL TUBE

Cho, Byung Jinresearcher; VANDENABEELE, P; MAEX, K, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.7, no.3, pp.345 - 353, 1994-08

7

ESTIMATION OF EFFECTIVE DIFFUSION TIME IN A RAPID THERMAL-DIFFUSION USING A SOLID DIFFUSION SOURCE

Cho, Byung Jinresearcher; PARK, SK; Kim, Choong Ki, IEEE TRANSACTIONS ON ELECTRON DEVICES, v.39, no.1, pp.111 - 117, 1992-01

8

Anomalous field-oxide-ungrowth phenomenon in recessed local oxidation of silicon isolation structure

Cho, Byung Jinresearcher; Jang, S.-A.; Kim, Y.-B.; Lee, D.-D.; Kim, J.-C., JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.144, no.1, pp.320 - 326, 1997

9

Nano-trenched local oxidation of silicon isolation using island polysilicon grains

Kwon, S.-K.; Lim, C.; Cho, Byung Jinresearcher; Kim, J.-C., JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.143, no.2, pp.639 - 642, 1996

10

A mechanism of field-oxide-ungrowth phenomenon in recessed isolation process and practical solution

Jang, SA; Kim, YB; Cho, Byung Jinresearcher; Kim, JC, JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.144, no.8, pp.2933 - 2940, 1997

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