AFM scanner용 초정밀 XYZ 스테이지의 설계, 특성분석 및 제어에 관한 연구A precision XYZ-stage for AFM scanner design, analysis and control
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 권대갑 | - |
| dc.contributor.advisor | Gweon, Dae-Gab | - |
| dc.contributor.author | 심종엽 | - |
| dc.contributor.author | Shim, Jong-Youp | - |
| dc.date.accessioned | 2011-12-14T06:32:59Z | - |
| dc.date.available | 2011-12-14T06:32:59Z | - |
| dc.date.issued | 1998 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=133424&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/44978 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 기계공학과, 1998.2, [ vii, 63 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 최적설계 | - |
| dc.subject | 압전소자 | - |
| dc.subject | 원자현미경 | - |
| dc.subject | 초정밀 3축 스테이지 | - |
| dc.subject | PID제어 | - |
| dc.subject | PID feedback controller | - |
| dc.subject | Optimal design | - |
| dc.subject | PZT | - |
| dc.subject | AFM | - |
| dc.subject | Precision XYZ-stage | - |
| dc.title | AFM scanner용 초정밀 XYZ 스테이지의 설계, 특성분석 및 제어에 관한 연구 | - |
| dc.title.alternative | A precision XYZ-stage for AFM scanner design, analysis and control | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 133424/325007 | - |
| dc.description.department | 한국과학기술원 : 기계공학과, | - |
| dc.identifier.uid | 000963342 | - |
| dc.contributor.localauthor | 권대갑 | - |
| dc.contributor.localauthor | Gweon, Dae-Gab | - |
- Appears in Collection
- ME-Theses_Master(석사논문)
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