학위논문(박사) - 한국과학기술원 : 기계공학전공, 2006.8, [ vii, 75 p. ]
평행도; 진직도; 2차원 오차; 평면 XY 스테이지; 운동오차; Motion error; Parallelism; Straightness; Two-dimesional Error; Planar XY stage
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