정전구동 미소 광개폐 소자의 평판 디스플레이 응용에 관한 연구Electrostatically driven micro-shutter for flat panel display applications
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 윤용산 | - |
| dc.contributor.advisor | Yoon, Yong-San | - |
| dc.contributor.author | 이용일 | - |
| dc.contributor.author | Lee, Yong-Il | - |
| dc.date.accessioned | 2011-12-14T05:17:15Z | - |
| dc.date.available | 2011-12-14T05:17:15Z | - |
| dc.date.issued | 1999 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=156002&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/42966 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 기계공학과, 1999.8, [ [ix], 120 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 평판디스플레이 | - |
| dc.subject | 미소광개폐소자 | - |
| dc.subject | 정전구동 | - |
| dc.subject | 미소기전소자 | - |
| dc.subject | 기상식각 | - |
| dc.subject | Vapor phase etching | - |
| dc.subject | Flat panel display | - |
| dc.subject | Micro-shutter | - |
| dc.subject | Electrostatic actuation | - |
| dc.subject | MEMS | - |
| dc.title | 정전구동 미소 광개폐 소자의 평판 디스플레이 응용에 관한 연구 | - |
| dc.title.alternative | Electrostatically driven micro-shutter for flat panel display applications | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 156002/325007 | - |
| dc.description.department | 한국과학기술원 : 기계공학과, | - |
| dc.identifier.uid | 000835602 | - |
| dc.contributor.localauthor | 윤용산 | - |
| dc.contributor.localauthor | Yoon, Yong-San | - |
- Appears in Collection
- ME-Theses_Ph.D.(박사논문)
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