정전구동 미소 광개폐 소자의 평판 디스플레이 응용에 관한 연구 = Electrostatically driven micro-shutter for flat panel display applications

Advisors
윤용산researcherYoon, Yong-Sanresearcher
Publisher
한국과학기술원
Issue Date
1999
Identifier
156002/325007 / 000835602
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 기계공학과, 1999.8, [ [ix], 120 p. ]

Keywords

평판디스플레이; 미소광개폐소자; 정전구동; 미소기전소자; 기상식각; Vapor phase etching; Flat panel display; Micro-shutter; Electrostatic actuation; MEMS

URI
http://hdl.handle.net/10203/42966
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=156002&flag=t
Appears in Collection
ME-Theses_Ph.D.(박사논문)
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