정전구동 미소 광개폐 소자의 평판 디스플레이 응용에 관한 연구Electrostatically driven micro-shutter for flat panel display applications
- Advisors
- 윤용산researcher; Yoon, Yong-Sanresearcher
- Description
- 한국과학기술원 : 기계공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1999
- Identifier
- 156002/325007 / 000835602
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 기계공학과, 1999.8, [ [ix], 120 p. ]
- Keywords
평판디스플레이; 미소광개폐소자; 정전구동; 미소기전소자; 기상식각; Vapor phase etching; Flat panel display; Micro-shutter; Electrostatic actuation; MEMS
- Appears in Collection
- ME-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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